Design and Simulation of Bidirectional In-Plane Chevron Beam Microtweezer
نویسندگان
چکیده
This paper presents the modified design of a bidirectional electrothermal chevron beam microtweezer proposed by J. K. Luo [1]. The original design has been modified to include inward in-plane motion. Thus, the modified design is capable of bidirectional motion. The structures are designed and simulated using COMSOL Multiphysics 4.2a. The bidirectional chevron beam microtweezer shows an in-plane displacement of 2.192μm outward and 0.6178μm inward and an out-of-plane displacement of 2.1594×10 m for an applied voltage of 4V. The effect of number of beams, length of beams and residual stress on the deflection of the chevron beam microtweezer has also been studied. A comparison between calculated and simulated results has been shown for the displacement of the actuator and both of them are in agreement with each other.
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